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Multiple wavelength ellipsometry in thin unaxial non-absorbing films

A.F. Antippa, R.M. Leblanc and D. Ducharme
Journal of the Optical Society of America
vol. 3, no. 11, pp. 1794-1802 (1986)

Abstract
We develop, and solve, the equations of multiple wavelength ellipsometry for thin uniaxial non-absorbing films . We show that the values of the thickness and the real refractive indices ( parallel and perpendicular to the optical axis ) of the thin film, can be obtained by three measurements, at three different wavelengths, of the phase difference (between the filmed and bare substrate phase changes caused by reflection), provided that the refractive indices of both the incident medium as well as the substrate are significatively dispersive. We also show, in the case of a dispersive thin film, how to determine the indices of refraction in terms of wavelength, up to any desired accuracy, by making the appropriate number of measurements of the phase difference at different wavelengths.



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